Dual radio-frequency discharges: Effective frequency concept and effective frequency transition

Breakdown behavior in radio-frequency argon discharges

Electrical characterization of radio frequency discharges

Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current–voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardi...

Radio Frequency ‘Sutureless’ Fistulotomy: An Effective Modification of the Conventional Technique

Capacitively-coupled radio-frequency hydrogen discharges: the role of kinetics

This paper presents a systematic characterization of capacitively-coupled radio-frequency hydrogen discharges, produced within a parallel plate cylindrical setup at different rf applied voltages (Vrf = 50− 600 V), frequencies (f = 13.56− 40.56 MHz), and pressures (p = 0.2− 1 torr). A twodimensional, time-dependent fluid model for charged particle transport is self-consistently solved coupled to...

Electronbeam controlled radio frequency discharges for plasma processing

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